Fabrication of Si nano pillar using Bio-template Ultimate Top-down Processes and Its Thermal conductivity
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- KIKUCHI AKIOU
- GSE, Tohoku Univ. Central glass
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- Akifumi Yao
- Central glass
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- Isamu Mori
- Central glass
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- Seiji Samukawa
- IFS, Tohoku Univ.
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- Takahito Ono
- GSE, Tohoku Univ.
Bibliographic Information
- Other Title
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- バイオテンプレート極限加工技術を用いたSiナノピラーの作製と熱伝導率の測定
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2016.1 (0), 1844-1844, 2016-03-03
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390295447133970432
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC