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Electric properties of thermal oxide formed by minimal resistance furnace(III)
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- Nakato Katsuhiko
- MINIMAL
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- Imura Fumito
- MINIMAL
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- Asano Hitoshi
- MINIMAL
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- Suzuki Shinnosuke
- MINIMAL Koyo Thermo System
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- Matsuda Shogo
- MINIMAL Koyo Thermo System
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- Yaginuma Ayami
- MINIMAL Koyo Thermo System
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- Morikawa Kiyohiko
- MINIMAL Koyo Thermo System
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- Hattori Masashi
- MINIMAL Koyo Thermo System
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- Ikeda Shinichi
- MINIMAL AIST
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- Khumpuang Sommawan
- MINIMAL AIST
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- Hara Shiro
- MINIMAL AIST
Bibliographic Information
- Other Title
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- ミニマル抵抗加熱炉で形成した熱酸化膜の電気的特性（Ⅲ）
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2015.1 (0), 2886-2886, 2015-02-26
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390296066524420992
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC