Effect of ion irradiation for MBE growth of cubic boron nitride (c-BN) thin films
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- Hirama Kazuyuki
- NTT BRL
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- Taniyasu Yoshitaka
- NTT BRL
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- Karimoto Shin-ichi
- NTT BRL
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- Yamamoto Hideki
- NTT BRL
Bibliographic Information
- Other Title
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- 立方晶窒化ホウ素(c-BN)薄膜のMBE成長におけるイオン照射の効果
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2015.1 (0), 3289-3289, 2015-02-26
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390296066524868096
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC