EVALUATION OF DEFECTS IN SINGLE CRYSTAL BY THE LIGHT SCATTERING TOMOGRAPHY

DOI IR Web Site

Bibliographic Information

Other Title
  • 光散乱トモグラフィによる単結晶の欠陥評価
  • ヒカリ サンラン トモグラフィ ニ ヨル タンケッショウ ノ ケッカン ヒョウカ

Search this article

Description

Defects in several compound semiconducting single crystals are evaluated by using the light scattering tomography. The dislocations in ZnSe and ZnO single crystals are observed by decorating them with precipitate, which were generated by heat treatment. We obtain three dimensional views of linear and curved dislocations in ZnSe crystals. Linear dislocations are detected for the first time by several annealing. Micropipes along growth direction are also found by this method.

Journal

Details 詳細情報について

Report a problem

Back to top