Detail Study on Lattice Deformation and Recovery of GaN by Mg-ion-implantation and the Subsequent Thermal Annealing
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- Sun Zheng
- Nagoya Univ.
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- Olsson Marc
- Nagoya Univ.
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- Lu Di
- Nagoya Univ.
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- Nagayama Tsutomu
- Nissin Ion Equipment Co., Ltd.
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- Watanabe Tetsuya
- Nissin Electric Co., Ltd.
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- Honda Yoshio
- Nagoya Univ.
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- Amano Hiroshi
- Nagoya Univ. Akasaki Research Center
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2014.2 (0), 3252-3252, 2014-09-01
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390296420725694720
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- ISSN
- 24367613
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- Text Lang
- en
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- Data Source
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- JaLC