Trial Fabrication of PTFE Substrate Integrated Waveguide Intersection at Short Millimeter Wave Frequencies by SR Etching

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  • 放射光エッチングによる短ミリ波帯PTFE基板集積導波管横断回路の試作

Abstract

A process of forming the substrate integrated waveguide (SIW) by etching PTFE directly using synchrotron radiation and sputtering a metal on its surface has been reported. In this paper, a 180 GHz band PTFE SIW intersection (0 dB coupler) is fabricated by the same process, and its frequency characteristics are evaluated.

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