3P3-9 Study on optimization of shear horizontal surface acoustic Wave sensor structures using finite element method
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- Ota Yudai
- Shizuoka Univ.
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- Kondoh Jun
- Shizuoka Univ.
Bibliographic Information
- Other Title
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- 3P3-9 有限要素法を用いた横波型弾性表面波センサ構造の最適化に関する検討
Journal
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- Proceedings of Symposium on Ultrasonic Electronics
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Proceedings of Symposium on Ultrasonic Electronics 44 (0), 208-, 2023-11-13
Institute for Ultrasonic Elecronics
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Details 詳細情報について
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- CRID
- 1390299008195224576
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- ISSN
- 24331910
- 13488236
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- Text Lang
- en
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- Data Source
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- JaLC