Semiconductor front-end process technology overview Semiconductor front-end process technology overview

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  • 半導体前工程概論

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<p>Semiconductor was invented in Bell Labs in 1947. Since then, semiconductors have been developed as a result of the demands for diversification in the application, high speed, and high throughput. The evolution of semiconductor led to the miniaturization of transistors and the integration of electric circuit patterns. From the 1980s, in addition to the miniaturization based on the ultra-thin lithography line of semiconductors technology, lowcost mass production of the semiconductors was initiated based on the required characteristics. From what has been mentioned, there has been a demand to improve defectives.; for instance, the need for clean equipment, silicon Wafer cleaning, and highpurity materials.In this paper, we will outline the semiconductor front-end process, and will discuss the effects of the materials used in silicone cleaning and polishing, edging, lithography processes.</p>

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