Role of Dry Vacuum Pumps as a Backing Pump of Turbomolecular Pumps

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Bibliographic Information

Other Title
  • ターボ分子ポンプに対するドライ真空ポンプの役割

Abstract

<p>The operating pressure of a turbomolecular pump is several hundred Pa or less due to its pumping principle. Therefore, a dry vacuum pump is essential as a backing pump to achieve an oil-free environment. This report explains how dry vacuum pumps affect the pumping performance and reliability of turbomolecular pumps.</p>

Journal

  • Vacuum and Surface Science

    Vacuum and Surface Science 67 (4), 182-185, 2024-04-10

    The Japan Society of Vacuum and Surface Science

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