Development of Flexible Electro Ceramics Films Prepared by Photo-Assisted Metal Organic Deposition (MOD) and its Electrical Component Application

  • Tsuchiya Tetsuo
    Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
  • Uzawa Yuko
    Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
  • Nakajima Tomohiko
    Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
  • Yamaguchi Iwao
    Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
  • Nomoto Junichi
    Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST)

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  • 光反応プロセスによるフレキシブル電子セラミックス膜の開発と電子部品応用
  • ヒカリ ハンノウ プロセス ニ ヨル フレキシブル デンシ セラミックスマク ノ カイハツ ト デンシ ブヒン オウヨウ

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