Graphene Sheet-Base Highly Sensitive Pressure Sensor Using Area-Arrayed Pillar Structure

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  • WANG Zhi
    Dept. of Finemechanics, Grad. School of Eng., Tohoku Univ.
  • SUZUKI Ken
    Fracture and Reliability Research Institute, Tohoku University
  • MIURA Hideo
    Fracture and Reliability Research Institute, Tohoku University

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  • 二次元配列ピラー構造を用いたグラフェン応用超高感度圧力センサの開発

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