Real-time X-ray diffraction studies of surface structure during metalorganic chemical vapor deposition

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  • 高輝度放射光を用いた気相成長表面の実時間X線回折
  • 研究紹介 高輝度放射光を用いた気相成長表面の実時間X線回折
  • ケンキュウ ショウカイ コウキド ホウシャコウ オ モチイタ キソウ セイチョウ ヒョウメン ノ ジツジカン Xセン カイセツ

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Abstract

<p>Reconstructed surface structure and real-time surface structure analyses were performed by using an in situ synchrotron radiation undulator X-ray diffractometer combining a goniometer and a MOCVD growth system. The P-rich InP (001) surface grown by MOCVD has a (2×1) super-structure, which consists of P-dimers. The real-time surface structure monitoring shows the relationship between the supply rate of gaseous sources and surface structures, and surface structure changing.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 73 (5), 620-623, 2004-05-10

    The Japan Society of Applied Physics

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