Recent progress on the development of a laser terahertz emission microscope and its prospects for industrial applications

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  • テラヘルツ放射顕微鏡開発の最近の進展と産業応用の可能性
  • テラヘルツ ホウシャ ケンビキョウ カイハツ ノ サイキン ノ シンテン ト サンギョウ オウヨウ ノ カノウセイ

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Abstract

<p>One can observe terahertz (THz) radiation from various kinds of materials and devices, when excited with a femtosecond laser, owing to ultrafast current modulation, which reflects ultrafast transient phenomena in optically excited ones. By scanning the laser beam on them, THz emission images are obtained with a resolution of approximately the laser beam diameter rather than the THz wavelength. Thus the construction of a laser-THz emission microscope (LTEM) can provide a new tool for material/device science and applications. We proposed and have been developing an LTEM since 1997. Here we report on the recent progress of LTEM development, a dynamic LTEM, a near field LTEM, and some examples such as the noncontact localization of a LSI failure, the evaluation of solar cells, and the imaging of the surface potential of GaN wafers.</p>

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  • Oyo Buturi

    Oyo Buturi 84 (12), 1101-1106, 2015-12-10

    The Japan Society of Applied Physics

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