Quasi-ballistic electron transport in nanoscale semiconductor structures

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Other Title
  • ナノスケール半導体構造における準弾道電子輸送
  • ナノスケール ハンドウタイ コウゾウ ニ オケル ジュンダンドウ デンシ ユソウ

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Abstract

<p>Ultrasmall semiconductor devices with the effective channel length below 10 nm are now actively investigated theoretically and experimentally, although the symptom of the scaling limit also seems to appear. Under such circumstances, understanding the physical mechanism of electron transport is getting increasingly important for breaking through the technological limits. In the present paper, we present our recent results in the study of electron transport in nanoscale device structures. It is shown that, contrary to the naive picture of ballistic transport, electron transport is quasi-ballistic even in nanoscale devices, in which diffusive electrons associated with the boundary layer in the channel region as well as ballistic electrons contribute to electron transport.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 76 (10), 1135-1141, 2007-10-10

    The Japan Society of Applied Physics

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