Deposition of ta-C:B Coating by FCVA Using Boron Doped Target and Its Tribological Behaviors at Elevated Temperature up to 300℃
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- NEMOTO Kouki
- Nagoya University
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- UMEHARA Noritsugu
- Graduate School of Engineering, Nagoya University
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- TOKOROYAMA Takayuki
- Graduate School of Engineering, Nagoya University
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- MURASHIMA Motoyuki
- Graduate School of Engineering, Nagoya University
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- TAKIMOTO Yuji
- Hagiwara Plant, Tribology Division, Toyo Tanso Co., Ltd.
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- NAKAMICHI Kenji
- Nagoya Sales Office, Global Sales Division, Toyo Tanso Co., Ltd.
Bibliographic Information
- Other Title
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- FCVA法によるホウ素含有炭素ターゲットを用いたta-C:B膜の成膜および300℃までのトライボロジー特性
- FCVAホウ ニ ヨル ホウソ ガンユウ タンソ ターゲット オ モチイタ ta-C:Bマク ノ セイマク オヨビ 300℃ マデ ノ トライボロジー トクセイ
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Abstract
<p>Boron doped tetrahedral amorphous carbon (ta-C:B) coatings were deposited with Filtered Cathodic Vacuum Arc (FCVA) method using boron doped graphite target (B=0, 5 and 10 at. %). The material properties and tribological properties of ta-C:B coatings were obtained at 23~300℃. The amount of boron contents in ta-C:B coatings are from 0 to 5.1 at. %, and the hardness of coatings ware more than 30 GPa. The friction coefficient of ta-C:B3.1 at 300℃ is about 0.02 in air. The specific wear rate of ta-C:B coating were lower than normal ta-C coating by 34% and 46% for ta-C:B3.1 and ta-C:B5.1, respectively. The sp2/(sp2+ sp3) ratio measured by XPS and O/C ratio measured by AES increased through the friction at 300℃ for ta-C, on the other hand both values did not change for ta-C:B. Friction coefficients of ta-C:B3.1 were shown as 0.055 at 23℃ and about 0.02 at 100~300℃. The specific wear rate of ta-C:B3.1 at 23~300℃ in air was about 2.0 × 10−6 mm3/Nm. From these results, we confirmed that ta-C:B shows lower friction and higher specific wear resistance at 23~300℃ in air than ta-C.</p>
Journal
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- JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS
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JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS 63 (10), 699-705, 2018-10-15
Japanese Society of Tribologists
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Details 詳細情報について
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- CRID
- 1390564238035640832
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- NII Article ID
- 130007498089
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- NII Book ID
- AN10056166
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- ISSN
- 21899967
- 09151168
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- NDL BIB ID
- 029313400
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- CiNii Articles
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- Abstract License Flag
- Disallowed