燃焼炎3段階合成法による合成ダイヤモンド皮膜の表面粗さに及ぼす影響因子について

DOI Web Site Web Site 参考文献11件
  • 髙橋 護
    秋田大学大学院 理工学研究科
  • 瀬川 悟志
    秋田大学大学院 工学資源学研究科(現：旭ダイヤモンド工業㈱)
  • 神谷 修
    秋田大学大学院 理工学研究科

書誌事項

タイトル別名
  • Influence Factors of Surface Roughness of Synthesized Diamond Films by Three-step Synthesis Method Using Flame Combustion
  • ネンショウエン 3 ダンカイ ゴウセイホウ ニ ヨル ゴウセイ ダイヤモンド ヒマク ノ ヒョウメン アラサ ニ オヨボス エイキョウ インシ ニ ツイテ

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抄録

A flame combustion method enables the synthesis of diamond using acetylene-oxygen gas in ambient atmosphere. It has various advantages over other methods. We previously synthesized diamond films on a Mo substrate surface by the flame combustion method. In this method, most diamond films delaminate as a result of thermal stress during cooling. To prevent diamond film delamination for the synthesis of good diamond films, a three-step synthesis method was proposed. However, the surface roughness of synthesized diamond films by this method became large. In previous study, to reduce the surface roughness by flame combustion and to achieve good adhesion on the Mo substrate, the flow ratio of oxygen flow rate to acetylene flow rate and synthesis time of the three-step synthesis method were varied during the synthesis of diamond. In result, the surface roughness of synthesized diamond films was reduced by this method. However, the surface roughness was not yet enough, and it is more necessary to reduce the surface roughness. In this study, to reduce further the surface roughness, the diamond seed particles as generation nuclei for the diamond synthesis were changed to small. To investigate the surface morphology and the surface roughness of synthesized diamond films, synthesized films were observed. The diamond seed particles size and the flow ratio and synthesis time of the three-step synthesis method affected the surface morphology and the surface roughness of synthesized diamond films. The surface roughness of the synthesized film was reduced further by this study. The surface roughness in the Case 3 condition was the smallest in this experiment. Furthermore, to confirm influence factors of the surface roughness of synthesized diamond films, diamond seed particles on the substrate surface after the seeding treatment and generation nuclei on the substrate in the synthetic initial stage were observed.

収録刊行物

  • Journal of Smart Processing

    Journal of Smart Processing 6 (2), 87-94, 2017

    一般社団法人 スマートプロセス学会 （旧高温学会）

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