Impact of stress on the crystal structural nonuniformity along the film thickness direction by microfabrication of Pb(Zr,Ti)O<sub>3</sub> islands with morphotropic phase boundary composition
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- NISHIDE Masamichi
- Leading technology laboratory
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- YOKOYAMA Shintaro
- Department of Materials Science and Engineering, Tokyo Institute of Technology
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- FUNAKUBO Hiroshi
- Department of Materials Science and Engineering, Tokyo Institute of Technology
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- KATODA Takashi
- Leading technology laboratory
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- NISHIDA Ken
- Department of Communications Engineering, National Defense Academy
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説明
<p>Microscopic structure change induced by microfabrication of Pb(Zr,Ti)O3 (PZT) islands was investigated. The 3 µm-thick epitaxial (100)/(001)-oriented PZT film with Zr/(Zr + Ti) ratio of 0.56 consisted of both tetragonal and the rhombohedral phases. Tetragonal phase mainly existed near the film-substrate interface, while the rhombohedral one near the surface of the film. The profile of this structural non-uniformity along the film thickness was changed by the lateral size of PZT. These phenomena can be explained by the stress distribution in PZT and the understanding of this non-uniformity is the key to control the performance of the devices using PZT.</p>
収録刊行物
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- Journal of the Ceramic Society of Japan
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Journal of the Ceramic Society of Japan 127 (2), 123-126, 2019-02-01
公益社団法人 日本セラミックス協会
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詳細情報 詳細情報について
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- CRID
- 1390564238074206720
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- NII論文ID
- 130007588747
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- ISSN
- 13486535
- 18820743
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
- OpenAIRE
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- 抄録ライセンスフラグ
- 使用不可