Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses / Thin Film Shape Memory Alloys for Micro Actuators with Three-Dimensional Structures
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- Sakurai Junpei
- Graduate School of Engineering, Nagoya University
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- Hata Seiichi
- Graduate School of Engineering, Nagoya University
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Abstract
<p>In this paper, we investigate the characteristics of Ti-Ni-Zr thin film metallic glasses (TFMGs)/ shape memory alloys (SMAs) for microelectromechanical systems (MEMS) applications with three-dimensional structures. The amorphous Ti-Ni-Zr thin films having a Ni content of more than 50 at.% and Zr content of more than 11 at.% undergo glass transitions and are TFMGs. The Ti39Ni50Zr11 TFMG has the lowest glass transition temperature Tg of 703 K and a wide supercooled liquid region ΔT of 57 K. Moreover, it has high thermal stability at Tg. However, the apparent viscosity of the Ti39Ni50Zr11 is higher than those of other Ti-Ni-Zr TFMGs. Moreover, the Ti-Ni-Zr TFMG exhibits higher viscosity than conventional TFMGs because the alloy composition of Ti-Ni-Zr TFMGs/SMAs is far from the eutectic point.</p>
Journal
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- International Journal of Automation Technology
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International Journal of Automation Technology 9 (6), 662-667, 2015-11-05
Fuji Technology Press Ltd.
