Atomic Resolution EDS Mapping by Cs-Corrected STEM-EDS

DOI Web Site 13 References
  • Okunishi Eiji
    日本電子株式会社EM事業ユニットアプリケーション部
  • Onishi Ichiro
    日本電子株式会社EM事業ユニットアプリケーション部

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Other Title
  • 収差補正STEM-EDSによる原子分解能マッピング
  • シュウサ ホセイ STEM-EDS ニ ヨル ゲンシ ブンカイノウ マッピング

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Abstract

<p>Study of Atomic-column EELS mapping by using Cs-corrected STEM was reported by many groups. Atomic resolution EELS maps have been used to determine positions and species of atoms or atomic columns. On the other hand, atomic-column EDS mapping has not been attempted, because x-ray signal collection efficiency become 100 times worse than EELS. Recently, newly large sensor (100mm2) Silicon-Drift type X-ray detector (SDD) was developed for the improvement of signal collection efficiency. This paper reported result of atomic-column EDS mapping from several Oxide specimen by using large solid angle SD-detector with Cs-corrected STEM.</p>

Journal

  • KENBIKYO

    KENBIKYO 47 (3), 172-175, 2012-09-30

    The Japanese Society of Microscopy

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