Laser Processing with Line-Beam Shaped Femtosecond Pulses

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  • HASEGAWA Satoshi
    Center for Optical Research and Education (CORE), Utsunomiya University
  • HAYASAKI Yoshio
    Center for Optical Research and Education (CORE), Utsunomiya University

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  • ラインビーム整形されたフェムト秒パルスを用いたレーザー加工
  • Laser Original ラインビーム整形されたフェムト秒パルスを用いたレーザー加工
  • Laser Original ラインビーム セイケイ サレタ フェムトビョウ パルス オ モチイタ レーザー カコウ

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Abstract

Line-shaped femtosecond pulse is well suitable for large-area machining that requires a high-speed fabrication, for example, laser cutting, peeling and grooving. In this study, we demonstrate a shingleshot fabrication of three-dimensional line structure inside a glass, a laser peeling of indium tin oxide fi lm and a laser grooving of stainless with the line-shaped pulses by a diffractive cylindrical lens on a spatial light modulator.

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