Surface shape measurement by using entanglement photon state (the 2nd report)

DOI

Bibliographic Information

Other Title
  • interference and distance measurement
  • interference and distance measurement

Description

<p>Surface of x-ray mirror or sub-wavelength device need to be measured in a depth precision of nano-order. Interferometry is widely used in surface shape measurement but its precision in depth is limited by the wavelength of light source, with a tens-nano-order. The purpose of this paper is to develop a new interferometry with nano-order precision for surface shape measurement, using entanglement photon state (EPS) as light source. Wavelength of N photon entanglement state is demonstrated N times shorter than the wavelength of a single photon, according to the definition of de-Broglie wave. Thus, by using EPS as light source, interferometry can have a higher precision, up to nano-order. In the last paper, the generation of EPS (N = 2) is done, by two-photon-interference. This paper will report a distance measurement with higher precision than single photon state. The distance is measured by the interference of EPS with a high repeatability.</p>

Journal

Keywords

Details 詳細情報について

  • CRID
    1390568617217317888
  • NII Article ID
    130007988912
  • DOI
    10.11522/pscjspe.2020a.0_364
  • Text Lang
    en
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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