隔膜真空計の原理と技術

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  • 大沼 永幸
    キヤノンアネルバ株式会社　コンポーネント事業推進センター　コンポーネント開発部

書誌事項

タイトル別名
  • Principle and Technology of Capacitance Diaphragm Gauge
  • カクマク シンクウケイ ノ ゲンリ ト ギジュツ

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抄録

<p>A diaphragm gauge is a vacuum gauge that utilizes the phenomenon that the diaphragm is elastically deformed by the pressure directly received from the gas to be measured. Due to this measuring principle, it is possible to measure the degree of vacuum with high accuracy regardless of the type of gas to be measured. However, it is known that the diaphragm itself is easily affected by heat and mechanical vibration and causes measurement error. To solve these problems, we have developed a MEMS pressure sensor diaphragm gauge that uses Si as the diaphragm material. As a result, we were able to overcome the conventional problems.</p>

収録刊行物

  • 表面と真空

    表面と真空 64 (4), 174-178, 2021-04-10

    公益社団法人 日本表面真空学会

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