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High Temperature Tolerant Barrier Film with Stacking Barrier Layers by Sputtering and ALD
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Journal
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- Proceedings of the International Display Workshops
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Proceedings of the International Display Workshops 891-, 2020-12-09
International Display Workshops General Incorporated Association
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Keywords
Details 詳細情報について
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- CRID
- 1390569302468983552
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- ISSN
- 18832490
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- Data Source
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- JaLC
- Crossref