Characterization of Au-Doped Ta2O5 Thin Films Prepared Using a Simple Co-Sputtering Method

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  • 共スパッタ法を用いたAu添加Ta2O5薄膜の作製とその光学特性の評価

Abstract

Au-doped Ta2O5 thin films were deposited using a co-sputtering method. From a transmission spectrum of an Au-doped Ta2O5 film after annealing, we observed a broad absorption peak that seems to be originated from Au nanoparticles. We found a possibility of producing Au nanoparticles in the film using our co-sputtering method.

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