バレルスパッタリング法によるPMMAポリマー粉末表面へのAu修飾における修飾効率の検討

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タイトル別名
  • バレルスパッタリングホウ ニ ヨル PMMA ポリマー フンマツ ヒョウメン エノ Au シュウショク ニ オケル シュウショク コウリツ ノ ケントウ
  • Study of the total sputtering yield for Au modification of PMMA polymer particles by barrel-sputtering technique

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Total sputtering yield, defined as the ratio of the amount of metal deposited on a powdery substrate and the total amount of metal sputter-deposited, was investigated from Au modification of glass plates and PMMA polymer particles by using barrel-sputtering technique. The dependence of the angle distribution of Au deposition on RF input power was studied in the beginning. The amount of Au deposition was found to linearly depend on the distance from the center of the barrel, and the total amount of Au deposition was also found to linearly depend on the bias voltage for sputtering performed. On the basis of the amount of Au deposited on the PMMA polymer particle and the total amount of Au sputter-deposited, it was concluded that the total sputtering yield for Au modification of PMMA polymer particles was ca. 11 %.

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