Fabrication of Nanoprotrusion Surface on AISI 316 Stainless Steel via Ar-N₂ Plasma Etching

DOI Web Site Web Site 参考文献47件
  • Hirano Mitsuhiro
    School of Earth, Energy and Environmental Engineering, Kitami Institute of Technology Research Division of Metallic Materials, Osaka Research Institute of Industrial Science and Technology
  • Takeda Shinya
    School of Earth, Energy and Environmental Engineering, Kitami Institute of Technology
  • Ohtsu Naofumi
    School of Earth, Energy and Environmental Engineering, Kitami Institute of Technology

書誌事項

タイトル別名
  • Fabrication of Nanoprotrusion Surface on AISI 316 Stainless Steel via Ar–N<sub>2</sub> Plasma Etching

この論文をさがす

抄録

<p>Argon (Ar) plasma etching of stainless steel is known to form a unique surface texture consisting of nanopillars of several hundred nanometers due to the use of carbide precipitates as a template. The present study demonstrates that adding a small amount of nitrogen (N2) gas to Ar plasma discharge gas reduces the pillar size and enhances the pillar density, thereby resulting in a densely arranged nanoprotrusion surface. Admixing 1% N2 to the discharge gas decreased the height of each nanopillar to approximately a quarter of its original height. A further increase in N2 gas hardly changed the size of the nanoprotrusions, yet its number density increased up to 5% N2 addition. Admixed N2 gas generates N2+ species in the plasma, which form tiny chromium nitride (CrN) precipitates on a stainless steel surface. These CrN precipitates have become an alternative template for plasma etching. Nanoprotrusion surfaces are expected to improve the tribological properties of stainless steel surfaces; thus, the introduced process has potential for industrial applications.</p>

収録刊行物

  • MATERIALS TRANSACTIONS

    MATERIALS TRANSACTIONS 63 (3), 357-362, 2022-03-01

    公益社団法人 日本金属学会

参考文献 (47)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ