純水の二流体スプレー時に発生する静電気と液滴特性の関係性

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  • 鈴木 洋陽
    愛知工業大学大学院工学研究科電気電子工学専攻
  • 福岡 靖晃
    愛知工業大学大学院工学研究科電気電子工学専攻
  • 森 竜雄
    愛知工業大学大学院工学研究科電気電子工学専攻
  • 一野 祐亮
    愛知工業大学大学院工学研究科電気電子工学専攻
  • 清家 善之
    愛知工業大学大学院工学研究科電気電子工学専攻

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  • ジュンスイ ノ ニリュウタイ スプレージ ニ ハッセイ スル セイデンキ ト エキテキ トクセイ ノ カンケイセイ

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Abstract

In the manufacturing of semiconductor chips, two-fluid spray cleaning using deionized water is commonly applied for particle removal and resist stripping. In the two-fluid spray, deionized water is atomized by compressed gas flow; however, the high resistivity of deionized water causes electrostatic discharge （ESD）. In this study, the electric current generated during the two-fluid spraying of deionized water was measured. In addition, we measured the velocity and size of flying droplets using shadow Doppler particle analyzer （SDPA） to clarify the relationship between the generated electric current and flying-droplet characteristics. From these characteristics, the relationship between the average flying-droplet velocity and generated current was derived, and the generated current increased in proportion to the cube of the droplet velocity. Because the higher the droplet velocity, the higher is the cleaning power; there is a tradeoff between the cleaning power and ESD probability.

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