ナノ秒パルス放電方式オゾナイザにおけるオゾン生成特性の空間依存性

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  • ナノビョウ パルス ホウデン ホウシキ オゾナイザ ニ オケル オゾン セイセイ トクセイ ノ クウカン イソンセイ

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Ozone characteristics such as strong oxidation power and no-residual toxicity makes it highly expected as a next generation oxidant. Ozone has been used in industrial wastewater treatments, oxidation of NOx, wafer cleaning, and so on. Nanosecond （ns） pulsed discharge-based ozonizer which has been developed recent years has achieved the higher ozone generation yield than the other discharge methods. However, this method still cannot clear an issue that the maximum ozone concentration saturates at approximately 40g/m3. The ozone concentration required for water purification application is more than 100g/m3. Therefore, improvement of ns pulsed discharge method is necessary. It is assumed that the main causes of ozone concentration saturation are ozone thermal decomposition due to gas temperature rise and electron impact decomposition of ozone. In this study, we investigated the spatiotemporal change in ozone concentration due to discharge under the condition of less than 700 J/L where spatially uniform thermal decomposition of ozone doesnʼt occur. The result shows that primary streamers are more suitable for ozone generation than secondary streamers in terms of ozone concentration improvement. Thus, ns pulsed discharge consisting only of primary streamers is considered suitable for ozone generation.

収録刊行物

  • 静電気学会誌

    静電気学会誌 46 (1), 2-7, 2022

    一般社団法人静電気学会

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