Fabrication of DUV-LED on High-Temperature Annealed Sputter-Deposited AlN Template
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- Uesugi Kenjiro
- SPORR, Mie Univ.
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- Tezen Yuta
- SPORR, Mie Univ.
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- Shojiki Kanako
- Grad. School of Eng., Mie Univ.
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- Kuboya Shigeyuki
- SPORR, Mie Univ.
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- Miyake Hideto
- Grad. School of Eng., Mie Univ. Grad. School of RIS, Mie Univ.
Bibliographic Information
- Other Title
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- 高温アニールしたスパッタ成膜AlNテンプレート上へのDUV-LED作製
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.1 (0), 3124-3124, 2020-02-28
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390573715144235904
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC