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Characterization of film and boron quantification after heat treatment of MTJ layer
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- Tanahashi Yusaku
- Toray Research Center, Inc.
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- Shimizu Yumiko
- Toray Research Center, Inc.
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- Sugimoto Tomomi
- Toray Research Center, Inc.
Bibliographic Information
- Other Title
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- MTJ層の熱処理前後における膜質評価およびBoron定量化の検討
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.2 (0), 2133-2133, 2019-09-04
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390574290261376640
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC