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Design and Verification of Water Flow in Batch-Type Silicon Wafer Wet Cleaner
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- Takahashi Toshinori
- Yokohama Nat. Univ.
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- Matsuo Miya
- Yokohama Nat. Univ.
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- Habuka Hitoshi
- Yokohama Nat. Univ.
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- Goto Akihiro
- Pre-Tech
Bibliographic Information
- Other Title
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- バッチ式シリコンウエハ湿式洗浄装置における水流の設計と検証
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.2 (0), 2968-2968, 2019-09-04
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390574290261651456
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC
