Temperature dependence of Cp<sub>2</sub>Mg using <i>in-situ</i> monitoring in MOVPE reactor
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- Sato Yoko
- HORIBA STEC
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- Hayashi Daisuke
- HORIBA STEC
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- Minami Masakazu
- HORIBA STEC
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- Muramatsu Noboru
- Meijo Univ.
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- Iwaya Motoaki
- Meijo Univ.
Bibliographic Information
- Other Title
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- MOVPEリアクタ内におけるCp<sub>2</sub>Mgの温度依存性
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.1 (0), 3125-3125, 2019-02-25
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390574677162781568
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC