Three-Dimensional Multiphysics Simulation with GaN Crystal Growth in MOVPE Method
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- Kawakami Kento
- Graduate School of Engineering, Nagoya Univ.
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- Komura Subaru
- Graduate School of Engineering, Nagoya Univ.
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- Kusaba Akira
- RIAM, Kyushu Univ.
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- Yoshimatsu Katsunori
- Graduate School of Engineering, Nagoya Univ. IMaSS, Nagoya Univ.
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- Okamoto Naoya
- Graduate School of Engineering, Nagoya Univ.
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- Kangawa Yoshihiro
- IMaSS, Nagoya Univ. RIAM, Kyushu Univ.
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- Kakimoto Koichi
- RIAM, Kyushu Univ.
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- Shiraishi Kenji
- Graduate School of Engineering, Nagoya Univ. IMaSS, Nagoya Univ.
Bibliographic Information
- Other Title
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- MOVPE法のGaN結晶成長3次元マルチフィジックスシミュレーション
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.1 (0), 3154-3154, 2019-02-25
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390574677162798592
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC