Thermodynamic Analysis of Ga<sub>2</sub>O<sub>3</sub> Growth by Metalorganic Vapor Phase Epitaxy
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- Yamanobe Sakiko
- Tokyo Univ. of Agri. & Tech.
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- Yoshida Kento
- Tokyo Univ. of Agri. & Tech.
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- Konishi Keita
- Tokyo Univ. of Agri. & Tech.
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- Kumagai Yoshinao
- Tokyo Univ. of Agri. & Tech. TUAT GIR
Bibliographic Information
- Other Title
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- 有機金属気相成長法を用いた酸化ガリウム結晶成長の熱力学解析
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.2 (0), 3772-3772, 2018-09-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390574909315767424
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC