Pre-cleaning Effects for Al<sub>2</sub>O<sub>3</sub>/<i>p</i>-In<sub>x</sub>Ga<sub>1-x</sub>As MOS Interfaces
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- Yokoyama Chiaki
- Tokyo Univ.
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- Chang Chi-Yu
- Tokyo Univ.
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- Kato Kimihiko
- Tokyo Univ.
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- Takenaka Mitsuru
- Tokyo Univ.
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- Takagi Shinichi
- Tokyo Univ.
Bibliographic Information
- Other Title
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- Al<sub>2</sub>O<sub>3</sub>/<i>p</i>-In<sub>x</sub>Ga<sub>1-x</sub>As MOS界面に与える前処理の効果
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.1 (0), 3073-3073, 2018-03-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390575130485690112
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC