LLSAW propagation characteristics for ScAlN film/Quartz or Sapphire substrate
-
- Sawada Naoya
- Univ. of Yamanashi
-
- Suzuki Masashi
- Univ. of Yamanashi
-
- Kakio Shoji
- Univ. of Yamanashi
Bibliographic Information
- Other Title
-
- ScAlN薄膜/水晶基板またはサファイア基板構造における縦型リーキーSAW伝搬特性の理論解析
Journal
-
- JSAP Annual Meetings Extended Abstracts
-
JSAP Annual Meetings Extended Abstracts 2018.1 (0), 552-552, 2018-03-05
The Japan Society of Applied Physics
- Tweet
Details 詳細情報について
-
- CRID
- 1390575130486575872
-
- ISSN
- 24367613
-
- Text Lang
- ja
-
- Data Source
-
- JaLC