Preface for the Special Issue of ALC'21 Online

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<p>The 13th International Symposium “Atomic Level Characterizations for New Materials and Devices '21 (ALC'21 Online)” was held virtually from October 19 to 20, 2021, under the organization of the Division of Microbeam Analysis, the Japan Society of Vacuum and Surface Science (JVSS). ALC'21 was initially planned to be held in Okinawa, Japan, but the on-site meeting was postponed to 2022 as ALC'22 due to the COVID-19 pandemic. ALC'21 Online was held as a pre-meeting for ALC'22. In this symposium, there were 276 participants from 17 countries, and 86 papers, consisting of two Plenaries, three Tutorials, and 81 posters, were presented in a wide range of research fields related to atomic level characterization. Twelve papers out of them are collected in this special issue. </p>

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