Fabrication of Si/SiGe<sub>0.3</sub> nano wire using Bio-template Ultimate Top-down Process and Its Thermal conductivity
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- KIKUCHI AKIOU
- GSE, Tohoku Univ. Central glass Co. Ltd.
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- YAO AKIFUMI
- Central glass Co. Ltd.
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- YAMAMOTO ATSUSHI
- AIST
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- ONO TAKAHITO
- GSE, Tohoku Univ.
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- SAMUKAWA SEIJI
- IFS, Tohoku Univ. AIMR, Tohoku Univ.
Bibliographic Information
- Other Title
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- バイオテンプレート極限加工技術を用いたSi/SiGe<sub>0.3</sub>ナノワイヤーの作製と熱伝導率の評価
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2017.2 (0), 1904-1904, 2017-08-25
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390575418085897856
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC