Minimal Fab Process using High-Speed MP and CMP Machines
-
- Umeyama Norio
- AIST MINIMAL
-
- Koga Kazuhiro
- AIST MINIMAL
-
- Imura Fumito
- AIST MINIMAL
-
- Shibuya Kazutaka
- Fujikoshi Machinery
-
- Fuse Takayuki
- Fujikoshi Machinery
-
- Nakamura Yoshio
- Fujikoshi Machinery
-
- Ichikawa Kouichiro
- Fujikoshi Machinery
-
- Khumpuang Sommawan
- AIST MINIMAL
-
- Hara Shiro
- AIST MINIMAL
Bibliographic Information
- Other Title
-
- 高速MP・CMP装置を用いたミニマルファブプロセス
Journal
-
- JSAP Annual Meetings Extended Abstracts
-
JSAP Annual Meetings Extended Abstracts 2016.1 (0), 2923-2923, 2016-03-03
The Japan Society of Applied Physics
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1390576922111456000
-
- ISSN
- 24367613
-
- Text Lang
- ja
-
- Data Source
-
- JaLC