Thin film Deposition by Ionic Liquid EMIM-N(CN)2 Ion Beams
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- Hoshide Yuki
- Photonics and Electronics Science and Engineering Center, Kyoto Univ.
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- Takeuchi Mitsuaki
- Photonics and Electronics Science and Engineering Center, Kyoto Univ.
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- Ryuto Miromichi
- Photonics and Electronics Science and Engineering Center, Kyoto Univ.
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- Takaoka Gikan
- Photonics and Electronics Science and Engineering Center, Kyoto Univ.
Bibliographic Information
- Other Title
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- イオン液体EMIM-N(CN)<sub>2</sub>イオンビームによる薄膜形成
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2014.2 (0), 1489-1489, 2014-09-01
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390577895701096960
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC