Effect of O<sub>2</sub>/(Ar+O<sub>2</sub>) ratio during deposition on InZnMgO:Al TCO
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- Yoneda Takumi
- Ritsumeikan University.
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- Bobur Ergashev
- Ritsumeikan University.
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- Negami Takayuki
- Ritsumeikan University.
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- Kawano Yuu
- Ritsumeikan University.
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- Minemoto Takashi
- Ritsumeikan University.
Bibliographic Information
- Other Title
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- 成膜時のO<sub>2</sub>/(Ar+O<sub>2</sub>)比がInZnMgO:Al透明導電膜に与える影響について
Journal
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- Proceedings of the Annual Meeting of the Japan Photovoltaic Society
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Proceedings of the Annual Meeting of the Japan Photovoltaic Society 3 (0), 90-90, 2023-06-23
The Japan Photovoltaic Society
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Details 詳細情報について
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- CRID
- 1390578680540036864
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- ISSN
- 24366498
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- Text Lang
- ja
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- Data Source
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- JaLC