Creation of 3 D Models from SEM Images of Fine Protrusions Formed by Sputter-Etching

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  • スパッタエッチングにより形成した微細突起物のSEM画像を用いた突起物３Dモデルの生成

Abstract

Argon ion sputter-etching of stainless steels forms fine cone-, column-, and grain-shaped protrusions. The gripping ability between the fine protrusions and soft and slippery sheet can be measured by experiment. However, to conduct a large number of experiments is time- and cost-consuming, whereas fundamental principles to predict the optimum gripping combinations between these protrusions and soft bodies have not been established. Thus, the implement of analysis and simulation of gripping behaviors of the fine protrusion are necessary. This paper presents an approach for creating 3D models of fine protrusions from their scanning electron microscope (SEM) images, which is an essential part of the analysis and simulation. The results of this research will be applied to the development of a software to find the optimum protrusion shapes and sizes depending on the properties and shapes of soft and slippery bodies.

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