固体電解質Li<sub>3</sub>PO<sub>4-x</sub>N<sub>x</sub>(LiPON)薄膜作製条件の検討
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2013.1 (0), 1286-1286, 2013-03-11
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390578847124200832
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC