Study of Humidity Sensor using α-Fe<sub>2</sub>O<sub>3</sub> as a Humidity-sensitive Material
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- Naito Kosuke
- Yatsukaho Research Campus, Kanazawa Institute of Technology
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- Sasaki Kyohei
- Yatsukaho Research Campus, Kanazawa Institute of Technology
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- Ikenaga Noriaki
- Yatsukaho Research Campus, Kanazawa Institute of Technology
Bibliographic Information
- Other Title
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- α-Fe<sub>2</sub>O<sub>3</sub>を感湿材料に用いた湿度センサの検討
Abstract
<p>In this study, iron oxide thin films are prepared under various heat treatment conditions, and their crystal structures and moisture-sensitive characteristics were evaluated to clarify the usefulness of iron oxide thin films as humidity-sensitive materials for humidity sensors. In addition, the possibility of a humidity sensor with a wide dynamic range was investigated by evaluating the relationship between the film thickness of the iron oxide thin film, the electrode width of the device, and the humidity-sensitive characteristics. As a result, it was found that the crystal structure of α-Fe2O3 exhibits relatively good humidity sensitivity compared to other crystal structures, and that the sensitivity to humidity can be adjusted by appropriately selecting the electrode width and film thickness of the device. Therefore, the α-Fe2O3 thin film may be useful as a moisture-sensitive material for wide dynamic range humidity sensors by appropriately adjusting the film thickness and electrode width.</p>
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 143 (11), 351-356, 2023-11-01
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390579454814930176
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- ISSN
- 13475525
- 13418939
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
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- Abstract License Flag
- Disallowed