Sphere diameter measurement using a micro-coordinate measuring machine

DOI
  • Kondo Yohan
    National Institute of Advanced Industrial Science Technology
  • Kawashima Natsumi
    National Institute of Advanced Industrial Science Technology
  • Hirai Akiko
    National Institute of Advanced Industrial Science Technology
  • Bitou Youichi
    National Institute of Advanced Industrial Science Technology

Bibliographic Information

Other Title
  • マイクロCMMを用いた球直径測定に関する研究
  • Development of T-shaped sharp styli
  • T型先鋭スタイラスの開発

Description

<p>The National Metrology Institute of Japan (NMIJ/AIST) has been developing a two-point diameter calibration technique of spheres using micro-coordinate measuring machine (µ-CMM) with a low-force touch probe. In this paper, an approach for reducing the interaction force between the sample surface and the probe of the µ-CMM will be reported to reduce the measurement uncertainty of sphere diameter. Compared to the previously used probe with a tip radius of 500 µm, T-shaped styli with a tip radius of about 8 µm was developed. This paper describes the relationship between interaction force and µ-CMM probing performance with stylus tip radius sharpening.</p>

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