Overview of Dry Sealed Vacuum Pump

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Other Title
  • ドライ真空ポンプ概論

Abstract

<p>Positive displacement vacuum pumps are the most commonly used pumps in the wide range of industry and research applications. In particular, dry sealed vacuum pumps which had been developed as of the mid 1950s could provide important advantages such as oil-free vacuum system and less contamination problem caused by lubricant and were accepted favorably in the semiconductor industry. Until the present day, various types of dry sealed vacuum pump with different principle or design have been expanding steadily their range of application. In this article, the outline such as history and feature of the latest representative dry sealed vacuum pumps is described in order to understand application compatibility.</p>

Journal

  • Vacuum and Surface Science

    Vacuum and Surface Science 67 (4), 156-160, 2024-04-10

    The Japan Society of Vacuum and Surface Science

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