一般産業向けドライ真空ポンプSST/SSX型

書誌事項

タイトル別名
  • Dry Vacuum Pump for General Industry Model SST/SSX

抄録

<p>The market for dry vacuum pumps occupies a large part of vacuum pumps, however, it is largely composed of frontier industries such as semiconductors, and FPD. General industries such as vacuum sintering, extruders, chemical plants, and food processing have not been adopted dry vacuum pumps in full scale because of their initial and maintenance cost. Those general industries tend to utilize water ring vacuum pumps and oil-sealed rotary vacuum pumps, which are low in initial cost, have abundant results and are easy to introduce. In recent years, from the viewpoint of environmental impact have become important because of efforts toward sustainable society, dry pumps that do not require sealing water oil have begun to be fully adopted in general industries. Hereinafter, while describing status of dry pumps in general industries, we would explain screw type dry pumps and screw rotors, and introduce our products.</p>

収録刊行物

  • 表面と真空

    表面と真空 67 (4), 176-181, 2024-04-10

    公益社団法人 日本表面真空学会

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