Invited paper : Characteristics of Charged Droplet Beams Produced from Vacuum Electrospray
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- Ninomiya Satoshi
- Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi
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- Sakai Yuji
- Clean Energy Research Center, University of Yamanashi
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- Chuin Chen Lee
- Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi
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- Hiraoka Kenzo
- Clean Energy Research Center, University of Yamanashi
書誌事項
- タイトル別名
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- Characteristics of Charged Droplet Beams Produced from Vacuum Electrospray
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抄録
<p> Recently, various cluster ion beam sources have been studied with the aim of improving sensitivity in secondary ion mass spectrometry (SIMS) and achieving damage-free etching in X-ray photoelectron spectroscopy (XPS). Thus, compact gas cluster ion beam guns are now available for commercial SIMS and XPS instruments. The electrospray droplet impact (EDI) method was also developed as a new source for massive cluster beam, in which the charged droplet beams are produced from ambient electrospray and introduced into the vacuum system. The EDI method has been successful in achieving efficient ionization of organic molecules, soft etching of polymers, and nonselective etching of metal oxides. However, the current EDI method lacks adequate beam focusing and brightness for practical use. As a solution for these problems, we have proposed and developed a new method for producing a charged droplet beam and a stable electrospray of aqueous solutions under vacuum. In this study, the characteristics of ambient and vacuum electrospray were investigated with optical microscopy, and the ability of vacuum electrospray as the primary beam source will be discussed.</p>
収録刊行物
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- Journal of Surface Analysis
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Journal of Surface Analysis 20 (3), 171-176, 2014
一般社団法人 表面分析研究会
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詳細情報 詳細情報について
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- CRID
- 1390845702274505472
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- NII論文ID
- 130007699897
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- NII書誌ID
- AA11448771
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- ISSN
- 13478400
- 13411756
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- NDL書誌ID
- 025338820
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可