個別動作型の形状記憶合金厚膜アレイ触覚ディスプレイ素子の形成

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  • Fabrication of Tactile Display Device with Individually-driven-type Shape Memory Alloy Thick Film Actuator Array
  • コベツ ドウサガタ ノ ケイジョウ キオク ゴウキン アツマク アレイ ショッカク ディスプレイ ソシ ノ ケイセイ

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<p>This paper presents fabrication and characteristics of a tactile display device with individually-driven-type shape memory alloy (SMA) actuator array (5×5, 1 mm pitch, 10 µm thick) for the purpose to provide complex vibrating stimulations to the human finger skin. Each SMA actuator element in the arrayed device has Pt thin film heater (10 µm wide) for heating above the shape recovery temperature (~65°C), and individually connected Au thin film electric lines (70 µm wide). The fabrication processes of double-layered Au and Pt thin film lines with an insulator layer were newly developed, and then, the individually-driven SMA thick film actuator array was successfully fabricated. The SMA film actuator generated 17 mN force by DC electric heating (41 mW). The generated force decreased due to the poor thermal response when it was driven at frequency of 15 Hz or higher. However, similar level force generation was obtained by driving at 20 Hz with suppressed duty ratio 15% (1.1 mJ for one cycle). There was no thermal interference on neighbor SMA actuator elements during the individual driving. An SU-8 micro-structure with arrayed micro-pins and bias springs was fabricated and bonded to the SMA thick film actuator array. Using the completed device, individual vibrating motion was successfully performed.</p>

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