Liquid-silicon processed polycrystalline silicon thin-film transistors on paper

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  • ISHIHARA Ryoichi
    Delft University of Technology, EEMCS, Q&CE, QuTech School of Materials Science, Japan Advanced Institute of Science and Technology
  • TRIFUNOVIC Miki
    Delft University of Technology, EEMCS, Q&CE, QuTech
  • SBERNA Paolo M.
    Delft University of Technology, EEMCS, Q&CE, QuTech
  • SHIMODA Tatsuya
    School of Materials Science, Japan Advanced Institute of Science and Technology

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Other Title
  • 液体Siによる紙の上での多結晶Si薄膜トランジスタ
  • エキタイ Si ニ ヨル カミ ノ ウエ デ ノ タケッショウ Si ハクマク トランジスタ

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Description

<p>Silicon can be printed using liquid silicon ink, which is a mixture of polymerized cyclopentasilane (CPS) and a solvent. Thermal annealing higher than 350°C of this material, however, was necessary, to convert it to solid silicon, which prevented its usage on inexpensive substrates with a limited thermal budget. We review a novel method that forms polycrystalline silicon (poly-Si) patterns directly on paper using the same liquid silicon with a doctor-blade coating and local irradiation of an excimer-laser with room temperature process. We review also the process and electrical properties of poly-Si TFTs fabricated on paper. This technique will be a breakthrough for printed electronics by enabling applications such as fast printed electronics that are inexpensive, fully-recyclable, biodegradable and even edible.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 88 (1), 26-30, 2019-01-10

    The Japan Society of Applied Physics

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